Type

Journal Article

Authors

Hongzhou Zhang
Dan Zhou
Arlene O'Neill
Daniel Fox
Jonathan Coleman

Subjects

Physics

Topics
condensed matter physics nanoscience materials nitrogen low energy electron layers graphene scanning

Nitrogen assisted etching of graphene layers in a scanning electron microscope (2011)

Abstract We describe the controlled patterning of nanopores in graphene layers by using the low-energy (<10?keV) focused electron beam in a scanning electron microscope. Regular nanometer-sized holes can be fabricated with the presence of nitrogen gas. The effect of the gas pressure, beam current, and energy on the etching process are investigated. Transmission electron microscopy, coupled with plasmon energy loss imaging, reveals the microstructure modification of the etched graphene. A nitrogen-ion assisted etching mechanism is proposed for the controlled patterning.
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Full list of authors on original publication

Hongzhou Zhang, Dan Zhou, Arlene O'Neill, Daniel Fox, Jonathan Coleman

Experts in our system

1
Hongzhou Zhang
Trinity College Dublin
Total Publications: 50
 
2
Arlene O'Neill
Trinity College Dublin
Total Publications: 25
 
3
Daniel Fox
Trinity College Dublin
Total Publications: 15
 
4
Jonathan Coleman
Trinity College Dublin
Total Publications: 217