Conference Proceedings


Justin Bogan
Greg Hughes
Venkateswaran Selvaraju
S. Armini
Robert O'Connor
Anita Brday-Boyd



soft x ray x ray photoelectron spectroscopy xps cobalt complementary metal oxide semiconductor electroless deposited physics copper eld

Characterisation of electroless deposited Cobalt by hard and soft X-ray photoemission spectroscopy (2018)

Abstract Electroless deposited (ELD) cobalt with palladium as a catalyst, and an underlying self-assembled monolayer (SAM) was investigated for potential use in advanced complementary metal oxide semiconductor (CMOS) applications using both hard (HAXPES) and soft (XPS) x-ray photoelectron spectroscopy. HAXPES spectra established the uniformity of the deposited Co film and the nature of the buried Co-Si interface ~20nm below the surface. The Pd is seen to diffuse through the Co following thermal annealing. While the deposited Co film is predominantly metallic, Co-silicide forms at the Co-Si interface upon deposition and decomposes with thermal anneal up to 500°C.
Collections Ireland -> Dublin City University -> Publication Type = Conference or Workshop Item
Ireland -> Dublin City University -> Status = Published
Ireland -> Dublin City University -> Subject = Physical Sciences: Physics
Ireland -> Dublin City University -> Subject = Physical Sciences
Ireland -> Dublin City University -> DCU Faculties and Centres = DCU Faculties and Schools: Faculty of Science and Health: School of Physical Sciences

Full list of authors on original publication

Justin Bogan, Greg Hughes, Venkateswaran Selvaraju, S. Armini, Robert O'Connor, Anita Brday-Boyd

Experts in our system

Justin Bogan
Dublin City University
Total Publications: 10
Greg Hughes
Dublin City University
Total Publications: 29
Robert O'Connor
Dublin City University
Total Publications: 74