Type

Journal Article

Authors

Ray Duffy
Paul K. Hurley
Roger Nagle
Niall McEvoy
Scott Monaghan
Cormac Ó Coileáin
Conor P Cullen
Shubhadeep Bhattacharjee
Farzan Gity
Lee A. Walsh
and 1 others

Subjects

Chemistry

Topics
transition metal energy annealing temperature raman spectroscopy method transfer metal ptse2 x ray photoelectron spectroscopy contact alloy formation

Effects of annealing temperature and ambient on Metal/PtSe2 contact alloy formation (2019)

Abstract Forming gas annealing is a common process step used to improve the performance of devices based on transition-metal dichalcogenides (TMDs). Here, the impact of forming gas anneal is investigated for PtSe2-based devices. A range of annealing temperatures (150, 250, and 350 °C) were used both in inert (0/100% H2/N2) and forming gas (5/95% H2/N2) environments to separate the contribution of temperature and ambient. The samples are electrically characterized by circular transfer length method structures, from which contact resistance and sheet resistance are analyzed. Ti and Ni are used as metal contacts. Ti does not react with PtSe2 at any given annealing step. In contrast to this, Ni reacts with PtSe2, resulting in a contact alloy formation. The results are supported by a combination of X-ray photoelectron spectroscopy, Raman spectroscopy, energy-dispersive X-ray spectroscopy, and cross-sectional transmission electron microscopy. The work sheds light on the impact of forming gas annealing on TMD–metal interfaces, and on the TMD film itself, which could be of great interest to improve the contact resistance of TMD-based devices.
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Full list of authors on original publication

Ray Duffy, Paul K. Hurley, Roger Nagle, Niall McEvoy, Scott Monaghan, Cormac Ó Coileáin, Conor P Cullen, Shubhadeep Bhattacharjee, Farzan Gity, Lee A. Walsh and 1 others

Experts in our system

1
Ray Duffy
University College Cork
Total Publications: 33
 
2
Paul K. Hurley
University College Cork
Total Publications: 78
 
3
Niall Mcevoy
Trinity College Dublin
Total Publications: 54
 
4
Scott Monaghan
University College Cork
Total Publications: 32
 
5
Conor P Cullen
University College Cork
Total Publications: 8
 
6
Farzan Gity
University College Cork
Total Publications: 26
 
7
Lee A. Walsh
University College Cork
Total Publications: 11