Type

Journal Article

Authors

Syed A M Tofail
Ehtsham Ul Haq
Sergey Beloshapkin
Fathima R. Laffir
Vasily A. Lebedev
Shane Geary
Bernard Stenson
Jan Kubik
Devendraprakash Gautam
Luke Guinane

Subjects

Physics

Topics
al2o3 surface topography rf magnetron sputtering kpfm surface charge industrial applications thick films nanoscale

Nanoscale topography, surface charge variation and defect correlation in 2–8 nm thick functional alumina films (2020)

Abstract In the nanometric regime, alumina films are often deposited by ALD methods yet in industrial applications, sputtered films thinner than 40 nm are used and research into those is sparse. Here, we investigated the nanoscale topography and the electrical properties of films less than 10 nm thick deposited by direct RF magnetron sputtering. Alumina films deposited on Si appeared to be uniform and topographically defect free as evaluated by TEM and AFM. However, their composition varied as a function of thickness as measured by XPS. The films were non-stoichiometric as Al content increased with film thickness. While SSRM measured current profiles did not highlight leakage sites or voids in the films, KPFM measured local charge fluctuations across the films deposited on Si and Au surfaces. The density of fluctuation sites decreased with an increase of alumina thickness. An electrodeposition method identified insulation weak spots in the alumina where Cu growths formed on the alumina surface. The growth mechanisms were investigated by TEM and EDX. The density of growths decreased with increased alumina thickness. Defects in the deposited alumina film are expected to be due to its nonstoichiometric nature causing charge variations, which weaken the films electrical insulating capability.
Collections Ireland -> University of Limerick -> Centres Science and Engineering
Ireland -> University of Limerick -> Faculty of Science and Engineering
Ireland -> University of Limerick -> Bernal Institute

Full list of authors on original publication

Syed A M Tofail, Ehtsham Ul Haq, Sergey Beloshapkin, Fathima R. Laffir, Vasily A. Lebedev, Shane Geary, Bernard Stenson, Jan Kubik, Devendraprakash Gautam, Luke Guinane

Experts in our system

1
Syed A M Tofail
University of Limerick
Total Publications: 54
 
2
Ehtsham Ul Haq
University of Limerick
Total Publications: 5
 
3
Fathima R. Laffir
University of Limerick
Total Publications: 35
 
4
Devendraprakash Gautam
University College Cork
Total Publications: 5