Type

Conference Proceedings

Authors

Colm O'Dwyer

Subjects

Chemistry

Topics
atomic force microscope au substrate wet etching electrochemistry sam coverage nanolithographic materials science laser cooled cs beam alkanethiol monolayer

Sub-100 nm Feature Definition Optimization using Cold Cs Beam Exposed Self-Assembled Monolayers on Au (2004)

Abstract The results of a study into the dependency of SAM coverage, subsequent post-etch pattern definition and minimum feature size on the quality of the Au substrate used in both physical mask and optical mask atomic nanolithographic experiments are presented in this paper. In comparison, sputtered Au substrates yield much smoother surfaces and a higher density of {111} oriented grains than evaporated Au surfaces. Phase imaging with an atomic force microscope shows that the quality and percentage coverage of uniform alkanethiol monolayer adsorption was much greater for sputtered Au surfaces. Exposure of the monolayer with a laser-cooled Cs beam allowed determination of the minimum Cs dose (2 monolayers) to expose the SAM with lateral force microscopy. Suitable wet-etching, with etch rates of 2.2 nm min-1, results in optimized pattern definition. Utilizing these optimizations, features as small as 50 nm were achieved using both a sub-100 nm physical mask and optical standing wave mask.
Collections Ireland -> University College Cork -> Research Institutes and Centres
Ireland -> University College Cork -> Applied Nanoscience Group - Conference Items
Ireland -> University College Cork -> Tyndall National Institute
Ireland -> University College Cork -> Applied Nanoscience Group
Ireland -> University College Cork -> Chemistry
Ireland -> University College Cork -> College of Science, Engineering and Food Science
Ireland -> University College Cork -> Micro-Nanoelectronics Centre
Ireland -> University College Cork -> Chemistry - Conference Items

Full list of authors on original publication

Colm O'Dwyer

Experts in our system

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Colm O'Dwyer
University College Cork
Total Publications: 121