Type

Conference Proceedings

Authors

Brett Paull
Mirek Macka
Mercedes Vázques
Dermot Brabazon
Shadi Karazi
Aymen Ben Azouz

Subjects

Physics

Topics
micro fluidics pulsed co2 laser micro channel glass lasers optical transmission laser micro machining micro fluidic devices

Effect of laser processing parameters and glass type on topology of micro-channels (2010)

Abstract Traditional processes to manufacture micro-fluidic devices include standard lithography, electron beam writing and photo-patterning. These techniques are well established but most are limited to surface micro-fabrication. Laser micro-machining provides an alternative for microfabrication of devices. This paper presents Design of Experiment models for the fabrication of micro-channel structures with four different types of glass, soda-lime, fused-silica, borosilicate and quartz. A 1.5kW CO2 laser with 90 μm spot size was used to fabricate micro-channels on the surface of glass sheets. Power, P, pulse repetition frequency, PRF, and translation speed, U, were set as control parameters. The resulting geometry of the channel (depth and width) and transmission capabilities were measured and analyzed. A comparison of the results of this experimental testing with the four glass types showed that quartz and fused-silica glasses would have better channel topologies for chemical sensing applications.
Collections Ireland -> Dublin City University -> Subject = Physical Sciences: Lasers
Ireland -> Dublin City University -> Publication Type = Conference or Workshop Item
Ireland -> Dublin City University -> DCU Faculties and Centres = DCU Faculties and Schools
Ireland -> Dublin City University -> Status = Published
Ireland -> Dublin City University -> DCU Faculties and Centres = DCU Faculties and Schools: Faculty of Engineering and Computing: School of Mechanical and Manufacturing Engineering
Ireland -> Dublin City University -> Subject = Physical Sciences
Ireland -> Dublin City University -> DCU Faculties and Centres = Research Initiatives and Centres: National Centre for Sensor Research (NCSR)
Ireland -> Dublin City University -> DCU Faculties and Centres = DCU Faculties and Schools: Faculty of Engineering and Computing
Ireland -> Dublin City University -> DCU Faculties and Centres = Research Initiatives and Centres

Full list of authors on original publication

Brett Paull, Mirek Macka, Mercedes Vázques, Dermot Brabazon, Shadi Karazi, Aymen Ben Azouz

Experts in our system

1
Brett Paull
Dublin City University
Total Publications: 120
 
2
Mirek Macka
Dublin City University
Total Publications: 34
 
3
Dermot Brabazon
Dublin City University
Total Publications: 162
 
4
Shadi Karazi
Dublin City University
Total Publications: 20
 
5
Aymen Ben Azouz
Dublin City University
Total Publications: 17