Type

Journal Article

Authors

Simon B. Newcomb
Patrick Casey
Greg Hughes
Robert O'Connor

Subjects

Physics

Topics
dielectric materials electric breakdown crystal defects magnesium compounds physics weibull distribution leakage currents high k dielectric thin films thin films

Degradation and breakdown characteristics of thin MgO dielectric layers (2010)

Abstract MgO has been suggested as a possible high-k dielectric for future complementary metal-oxide semiconductor processes. In this work, the time dependent dielectric breakdown (TDDB) characteristics of 20 nm MgO films are discussed. Stress induced leakage current measurements indicate that the low measured Weibull slopes of the TDDB distributions for both n-type and p-type devices cannot be attributed to a lower trap generation rate than for SiO2. This suggests that much fewer defects are required to trigger breakdown in MgO under voltage stress than is the case for SiO2 or other metal-oxide dielectrics. This in turn explains the progressive nature of the breakdown in these films which is observed both in this work and elsewhere. The reason fewer defects are required is attributed to the morphology of the films.
Collections Ireland -> Dublin City University -> Publication Type = Article
Ireland -> Dublin City University -> DCU Faculties and Centres = DCU Faculties and Schools
Ireland -> Dublin City University -> Status = Published
Ireland -> Dublin City University -> DCU Faculties and Centres = DCU Faculties and Schools: Faculty of Science and Health
Ireland -> Dublin City University -> Subject = Physical Sciences: Physics
Ireland -> Dublin City University -> Subject = Physical Sciences
Ireland -> Dublin City University -> DCU Faculties and Centres = DCU Faculties and Schools: Faculty of Science and Health: School of Physical Sciences
Ireland -> Dublin City University -> Subject = Physical Sciences: Thin films

Full list of authors on original publication

Simon B. Newcomb, Patrick Casey, Greg Hughes, Robert O'Connor

Experts in our system

1
Patrick Casey
University of Limerick
Total Publications: 7
 
2
Greg Hughes
Dublin City University
Total Publications: 29
 
3
Robert O'Connor
Dublin City University
Total Publications: 74