Type

Journal Article

Authors

Greg Hughes
Patrick Casey

Subjects

Physics

Topics
chemical interdiffusion silicon compounds metal insulator boundaries photoemission high k dielectric thin films physics magnesium annealing thermal stability thin films

Photoemission study of the SiO₂conversion mechanism to magnesium silicate (2010)

Abstract The objective of this work is to investigate interface chemistries which minimize the interfacial silicon oxide transition region at Si/high-k dielectric interfaces. We report on the mechanism by which a silicon native oxide layer is converted into magnesium silicate. The deposition of metal Mg onto a SiO native oxide surface resulted in the formation of a magnesium silicide in addition to substochiometric silicon oxides and a significant decrease in the oxidised silicon signal. Annealing to 300 °C resulted in the decomposition of the magnesium silicide, oxidation of the Mg, and the desorption of excess metallic Mg. Subsequent annealing to 500 °C resulted in converting the SiO2 into magnesium silicate. The results suggest that the decomposition of the Mg silicide in the presence of the residual native oxide facilitates silicate formation at 500 °C. Due to the reported thermal stability of Mg silicate it is suggested that this process may be beneficial in modifying the interface characteristics of the Si/high-k dielectric interface which has potentially significant implications for future semiconductor device generations.
Collections Ireland -> Dublin City University -> Publication Type = Article
Ireland -> Dublin City University -> DCU Faculties and Centres = DCU Faculties and Schools
Ireland -> Dublin City University -> Status = Published
Ireland -> Dublin City University -> DCU Faculties and Centres = DCU Faculties and Schools: Faculty of Science and Health
Ireland -> Dublin City University -> Subject = Physical Sciences: Physics
Ireland -> Dublin City University -> Subject = Physical Sciences
Ireland -> Dublin City University -> DCU Faculties and Centres = DCU Faculties and Schools: Faculty of Science and Health: School of Physical Sciences
Ireland -> Dublin City University -> Subject = Physical Sciences: Thin films

Full list of authors on original publication

Greg Hughes, Patrick Casey

Experts in our system

1
Greg Hughes
Dublin City University
Total Publications: 29
 
2
Patrick Casey
University of Limerick
Total Publications: 7