Type

Journal Article

Authors

Greg Hughes
Barry Brennan
Stephen McDonnell

Subjects

Physics

Topics
silicon compounds silicon interface phenomena hafnium compounds high k dielectric thin films physics photoelectron spectra carrier mobility defect states thin films binding energy

High resolution photoemission study of SiOx/Si(111) interface disruption following in situ HfO₂deposition (2009)

Abstract We report on an in situ high resolution core level photoemission study of the early stages of interface formation between an ultrathin SiOx layer ( ∼ 0.3 nm) grown on the atomically clean Si(111) surface and a HfO2 dielectric layer. Si 2p core level spectra acquired at 130 eV photon energy reveal evidence of a chemically shifted component on the lower binding energy side of the substrate peak which is attributed to interface defect states resulting from the incorporation of silicon atoms from the substrate into the interfacial oxide at room temperature. This evidence of Si/SiOx interface disruption would be expected to increase charge carrier scattering mechanisms in the silicon and contribute to the generally observed mobility degradation in high-k stacks with ultrathin silicon oxide interface layers.
Collections Ireland -> Dublin City University -> Publication Type = Article
Ireland -> Dublin City University -> DCU Faculties and Centres = DCU Faculties and Schools
Ireland -> Dublin City University -> Status = Published
Ireland -> Dublin City University -> DCU Faculties and Centres = DCU Faculties and Schools: Faculty of Science and Health
Ireland -> Dublin City University -> Subject = Physical Sciences: Physics
Ireland -> Dublin City University -> Subject = Physical Sciences
Ireland -> Dublin City University -> DCU Faculties and Centres = Research Initiatives and Centres: National Centre for Plasma Science and Technology (NCPST)
Ireland -> Dublin City University -> DCU Faculties and Centres = DCU Faculties and Schools: Faculty of Science and Health: School of Physical Sciences
Ireland -> Dublin City University -> DCU Faculties and Centres = Research Initiatives and Centres
Ireland -> Dublin City University -> Subject = Physical Sciences: Thin films

Full list of authors on original publication

Greg Hughes, Barry Brennan, Stephen McDonnell

Experts in our system

1
Greg Hughes
Dublin City University
Total Publications: 29
 
2
B. Brennan
University College Cork
Total Publications: 9
 
3
Stephen McDonnell
University College Cork
Total Publications: 8