Type

Journal Article

Authors

R. M. Wallace
J. Kim
K. J. Choi
F. S. Aguirre-Tostado
B. Lee
M. Milojevic
Greg Hughes
Stephen McDonnell
E. M. Vogel
A. M. Sonnet
and 1 others

Subjects

Physics

Topics
bonds chemical passivation gallium arsenide iii v semiconductors surface cleaning elemental semiconductors semiconductors silicon capacitance

Frequency dispersion reduction and bond conversion on n-type GaAs by in situ surface oxide removal and passivation (2007)

Abstract The method of surface preparation on n-type GaAs, even with the presence of an amorphous-Si interfacial passivation layer, is shown to be a critical step in the removal of accumulation capacitance frequency dispersion. In situ deposition and analysis techniques were used to study different surface preparations, including NH4OH, Si-flux, and atomic hydrogen exposures, as well as Si passivation depositions prior to in situ atomic layer deposition of Al2O3. As–O bonding was removed and a bond conversion process with Si deposition is observed. The accumulation capacitance frequency dispersion was removed only when a Si interlayer and a specific surface clean were combined.
Collections Ireland -> Dublin City University -> Publication Type = Article
Ireland -> Dublin City University -> DCU Faculties and Centres = DCU Faculties and Schools
Ireland -> Dublin City University -> Status = Published
Ireland -> Dublin City University -> DCU Faculties and Centres = DCU Faculties and Schools: Faculty of Science and Health
Ireland -> Dublin City University -> Subject = Physical Sciences
Ireland -> Dublin City University -> DCU Faculties and Centres = DCU Faculties and Schools: Faculty of Science and Health: School of Physical Sciences
Ireland -> Dublin City University -> Subject = Physical Sciences: Semiconductors

Full list of authors on original publication

R. M. Wallace, J. Kim, K. J. Choi, F. S. Aguirre-Tostado, B. Lee, M. Milojevic, Greg Hughes, Stephen McDonnell, E. M. Vogel, A. M. Sonnet and 1 others

Experts in our system

1
Robert M. Wallace
University College Cork
Total Publications: 18
 
2
Jiyoung Kim
University College Cork
Total Publications: 9
 
3
Greg Hughes
Dublin City University
Total Publications: 29
 
4
Stephen McDonnell
University College Cork
Total Publications: 8
 
5
E. M. Vogel
University College Cork
Total Publications: 9