Type

Journal Article

Authors

Hongzhou Zhang
John Boland
Gavin Behan

Subjects

Physics

Topics
ruthenium helium ion thin films spectroscopy experimental sample hafnium dioxide bias

Effect of sample bias on backscattered ion spectroscopy in the helium ion microscope (2010)

Abstract The authors present experimental results showing the effect of an applied bias voltage on backscattered ion spectra acquired from thin films of ruthenium and hafnia in the helium ion microscope. A characteristic peak associated with the presence of a thin layer of material is observed to shift as a function of sample bias voltage. The magnitude of this shift is measured, and the authors qualitatively estimate the composition of their samples as well as investigate the neutralization of ions by the sample in the helium ion micoscope (HeIM). They discuss the phenomenona in terms of thin films of ruthenium and hafnia and show the implications of these results on HeIM spectroscopy.
Collections Ireland -> Trinity College Dublin -> Administrative Staff Authors (Scholarly Publications)
Ireland -> Trinity College Dublin -> Administrative Staff Authors

Full list of authors on original publication

Hongzhou Zhang, John Boland, Gavin Behan

Experts in our system

1
Hongzhou Zhang
Trinity College Dublin
Total Publications: 50
 
2
John J Boland
Trinity College Dublin
Total Publications: 82