Type

Journal Article

Authors

Justin D. Holmes
Ray Duffy
Michael A. Morris
Gerard P McGlacken
Nikolay Petkov
Yordan M Georgiev
Brenda Long
Maryam Shayesteh
Anushka Gangnaik
Giuseppe Alessio Verni
and 1 others

Subjects

Physics

Topics
layers mld molecular shallow monolayer crystalline silicon high carrier concentration electrical characterization doping arsenic silicon density

Organo-arsenic Molecular Layers on Silicon for High-Density Doping. (2015)

Abstract This article describes for the first time the controlled monolayer doping (MLD) of bulk and nanostructured crystalline silicon with As at concentrations approaching 2 × 10(20) atoms cm(-3). Characterization of doped structures after the MLD process confirmed that they remained defect- and damage-free, with no indication of increased roughness or a change in morphology. Electrical characterization of the doped substrates and nanowire test structures allowed determination of resistivity, sheet resistance, and active doping levels. Extremely high As-doped Si substrates and nanowire devices could be obtained and controlled using specific capping and annealing steps. Significantly, the As-doped nanowires exhibited resistances several orders of magnitude lower than the predoped materials.
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Full list of authors on original publication

Justin D. Holmes, Ray Duffy, Michael A. Morris, Gerard P McGlacken, Nikolay Petkov, Yordan M Georgiev, Brenda Long, Maryam Shayesteh, Anushka Gangnaik, Giuseppe Alessio Verni and 1 others

Experts in our system

1
Justin D. Holmes
University College Cork
Total Publications: 287
 
2
Ray Duffy
University College Cork
Total Publications: 33
 
3
Michael A. Morris
University College Cork
Total Publications: 164
 
4
Gerard P McGlacken
University College Cork
Total Publications: 46
 
5
Nikolay Petkov
University College Cork
Total Publications: 64
 
6
Yordan M. Georgiev
University College Cork
Total Publications: 20
 
7
Brenda Long
University College Cork
Total Publications: 14
 
8
Maryam Shayesteh
University College Cork
Total Publications: 13
 
9
Anushka S. Gangnaik
University College Cork
Total Publications: 15
 
10
Giuseppe Alessio Verni
University College Cork
Total Publications: 6