Type

Journal Article

Authors

Georg S Duesberg
Jonathan N Coleman
Kangho Lee
Damien Hanlon
Nina C Berner
Hye-Young Kim
Toby Hallam
Niall Mcevoy
Maria O'Brien

Subjects

Chemistry

Topics
growth mechanism chemical vapour deposition supply raman spectroscopy transition metal x ray photoelectron spectroscopy precursor electronic components

Transition metal dichalcogenide growth via close proximity precursor supply. (2014)

Abstract Reliable chemical vapour deposition (CVD) of transition metal dichalcogenides (TMDs) is currently a highly pressing research field, as numerous potential applications rely on the production of high quality films on a macroscopic scale. Here, we show the use of liquid phase exfoliated nanosheets and patterned sputter deposited layers as solid precursors for chemical vapour deposition. TMD monolayers were realized using a close proximity precursor supply in a CVD microreactor setup. A model describing the growth mechanism, which is capable of producing TMD monolayers on arbitrary substrates, is presented. Raman spectroscopy, photoluminescence, X-ray photoelectron spectroscopy, atomic force microscopy, transmission electron microscopy, scanning electron microscopy and electrical transport measurements reveal the high quality of the TMD samples produced. Furthermore, through patterning of the precursor supply, we achieve patterned growth of monolayer TMDs in defined locations, which could be adapted for the facile production of electronic device components.
Collections Ireland -> Trinity College Dublin -> PubMed

Full list of authors on original publication

Georg S Duesberg, Jonathan N Coleman, Kangho Lee, Damien Hanlon, Nina C Berner, Hye-Young Kim, Toby Hallam, Niall Mcevoy, Maria O'Brien

Experts in our system

1
Georg Duesberg
Trinity College Dublin
Total Publications: 116
 
2
Jonathan Coleman
Trinity College Dublin
Total Publications: 217
 
3
Kangho Lee
Trinity College Dublin
Total Publications: 11
 
4
Damien Hanlon
Trinity College Dublin
Total Publications: 13
 
5
Nina C Berner
Trinity College Dublin
Total Publications: 20
 
6
Toby Hallam
Trinity College Dublin
Total Publications: 20
 
7
Niall Mcevoy
Trinity College Dublin
Total Publications: 54
 
8
Maria O'Brien
Trinity College Dublin
Total Publications: 7