Type

Journal Article

Authors

Michael A. Morris
Justin D. Holmes
Nikolay Petkov
Yordan M Georgiev
Anushka Gangnaik
Roisin A Kelly
Cian Cummins

Subjects

Chemistry

Topics
poly styrene self assembly domain size annealing nanolithography swelling effects solvent block copolymers

Solvent vapor annealing of block copolymers in confined topographies: commensurability considerations for nanolithography. (2014)

Abstract The directed self-assembly of block copolymer (BCP) materials in topographically patterned substrates (i.e., graphoepitaxy) is a potential methodology for the continued scaling of nanoelectronic device technologies. In this Communication, an unusual feature size variation in BCP nanodomains under confinement with graphoepitaxially aligned cylinder-forming poly(styrene)-block-poly(4-vinylpyridine) (PS-b-P4VP) BCP is reported. Graphoepitaxy of PS-b-P4VP BCP line patterns (CII ) is accomplished via topo-graphy in hydrogen silsequioxane (HSQ) modified substrates and solvent vapor annealing (SVA). Interestingly, reduced domain sizes in features close to the HSQ guiding features are observed. The feature size reduction is evident after inclusion of alumina into the P4VP domains followed by pattern transfer to the silicon substrate. It is suggested that this nano-domain size perturbation is due to solvent swelling effects during SVA. It is proposed that using a commensurability value close to the solvent vapor annealed periodicity will alleviate this issue leading to uniform nanofins.
Collections Ireland -> University College Cork -> PubMed

Full list of authors on original publication

Michael A. Morris, Justin D. Holmes, Nikolay Petkov, Yordan M Georgiev, Anushka Gangnaik, Roisin A Kelly, Cian Cummins

Experts in our system

1
Michael A. Morris
University College Cork
Total Publications: 164
 
2
Justin D. Holmes
University College Cork
Total Publications: 287
 
3
Nikolay Petkov
University College Cork
Total Publications: 64
 
4
Yordan M. Georgiev
University College Cork
Total Publications: 20
 
5
Anushka S. Gangnaik
University College Cork
Total Publications: 15
 
6
Roisin A Kelly
University College Cork
Total Publications: 10
 
7
Cian Cummins
Trinity College Dublin
Total Publications: 23