Type

Journal Article

Authors

Michael A. Morris
Justin D. Holmes
Barbara Kosmala
Sozaraj Rasappa
Ramsankar Senthamaraikannan
Dipu Borah

Subjects

Physics

Topics
films surface pmma formation self assembly microwave microwave irradiation thin films

Swift Nanopattern Formation of PS-b-PMMA and PS-b-PDMS Block Copolymer Films Using a Microwave Assisted Technique. (2013)

Abstract Microphase separation of block copolymer (BCPs) thin films has high potential as a surface patterning technique. However, the process times (during thermal or solvent anneal) can be inordinately long, and for it to be introduced into manufacturing, there is a need to reduce these times from hours to minutes. We report here BCP self-assembly on two different systems, polystyrene-b-polymethylmethacrylate (PS-b-PMMA) (lamellar- and cylinder-forming) and polystyrene-b-polydimethylsiloxane (PS-b-PDMS) (cylinder-forming) by microwave irradiation to achieve ordering in short times. Unlike previous reports of microwave assisted microphase segregation, the microwave annealing method reported here was undertaken without addition of solvents. Factors such as the anneal time and temperature, BCP film thickness, substrate surface type, etc. were investigated for their effect of the ordering behavior. The microwave technique was found to be compatible with graphoepitaxy, and in the case of the PS-b-PDMS system, long-range translational alignment of the BCP domains was observed within the topographic patterns. To demonstrate the usefulness of the method, the BCP nanopatterns were turned into an 'on-chip' resist by an initial plasma etch and these were used to transfer the pattern into the substrate.
Collections Ireland -> University College Cork -> PubMed

Full list of authors on original publication

Michael A. Morris, Justin D. Holmes, Barbara Kosmala, Sozaraj Rasappa, Ramsankar Senthamaraikannan, Dipu Borah

Experts in our system

1
Michael A. Morris
University College Cork
Total Publications: 164
 
2
Justin D. Holmes
University College Cork
Total Publications: 287
 
3
Sozaraj Rasappa
University College Cork
Total Publications: 13
 
4
Ramsankar Senthamaraikannan
University College Cork
Total Publications: 12
 
5
Dipu Borah
University College Cork
Total Publications: 17