Type

Journal Article

Authors

Michael A. Morris
Justin D. Holmes
Matthew T Shaw
Tarek Lutz
Colm C Faulkner
Dipu Borah
Sozaraj Rasappa

Subjects

Physics

Topics
silicon nanowire response time silicon on insulator poly methyl methacrylate low molecular weight silicon based cross sections silicon nanowires

Fabrication of a sub-10 nm silicon nanowire based ethanol sensor using block copolymer lithography. (2013)

Abstract This paper details the fabrication of ultrathin silicon nanowires (SiNWs) on a silicon-on-insulator (SOI) substrate as an electrode for the electro-oxidation and sensing of ethanol. The nanowire surfaces were prepared by a block copolymer (BCP) nanolithographic technique using low molecular weight symmetric poly(styrene)-block-poly(methyl methacrylate) (PS-b-PMMA) to create a nanopattern which was transferred to the substrate using plasma etching. The BCP orientation was controlled using a hydroxyl-terminated random polymer brush of poly(styrene)-random-poly(methyl methacrylate) (HO-PS-r-PMMA). TEM cross-sections of the resultant SiNWs indicate an anisotropic etch process with nanowires of sub-10 nm feature size. The SiNWs obtained by etching show high crystallinity and there is no evidence of defect inclusion or amorphous region production as a result of the pattern transfer process. The high density of SiNWs at the substrate surface allowed the fabrication of a sensor for cyclic voltammetric detection of ethanol. The sensor shows better sensitivity to ethanol and a faster response time compared to widely used polymer nanocomposite based sensors.
Collections Ireland -> University College Cork -> PubMed

Full list of authors on original publication

Michael A. Morris, Justin D. Holmes, Matthew T Shaw, Tarek Lutz, Colm C Faulkner, Dipu Borah, Sozaraj Rasappa

Experts in our system

1
Michael A. Morris
University College Cork
Total Publications: 164
 
2
Justin D. Holmes
University College Cork
Total Publications: 287
 
3
Matthew T Shaw
University College Cork
Total Publications: 24
 
4
Dipu Borah
University College Cork
Total Publications: 17
 
5
Sozaraj Rasappa
University College Cork
Total Publications: 13