Type

Journal Article

Authors

Justin D. Holmes
Nikolay Petkov
Michael A. Morris
Roisin A Kelly
Ciara T Bolger
Richard A Farrell
Richard G Hobbs

Subjects

Chemistry

Topics
room temperature thin films directed assembly block copolymer templated self assembly surface functionalization self assembly electron beam lithography dynamic environment hydrogen silsesquioxane sio2 thin films nanolithography hydrogen self assembled monolayer

Selective sidewall wetting of polymer blocks in hydrogen silsesquioxane directed self-assembly of PS-b-PDMS. (2012)

Abstract We show the importance of sidewall chemistry for the graphoepitaxial alignment of PS-b-PDMS using prepatterns fabricated by electron beam lithography of hydrogen silsesquioxane (HSQ) and by deep ultraviolet (DUV) lithography on SiO(2) thin films. Density multiplication of polystyrene-block-polydimethylsiloxane (PS-b-PDMS) within both prepatterns was achieved by using a room temperature dynamic solvent annealing environment. Selective tuning of PS and PDMS wetting on the HSQ template sidewalls was also achieved through careful functionalization of the template and substrate surface using either brush or a self-assembled trimethylsilyl monolayer. PDMS selectively wets HSQ sidewalls treated with a brush layer of PDMS, whiereas PS is found to selectively wet HSQ sidewalls treated with hexamethyldisilazane (HMDS) to produce a trimethylsilyl-terminated surface. The etch resistance of the aligned polymer was also evaluated to understand the implications of using block copolymer patterns which have high etch resistance, self-forming (PDMS) wetting layers at both interfaces. The results outlined in this work may have direct applications in nanolithography for continued device scaling toward the end-of-roadmap era.
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Full list of authors on original publication

Justin D. Holmes, Nikolay Petkov, Michael A. Morris, Roisin A Kelly, Ciara T Bolger, Richard A Farrell, Richard G Hobbs

Experts in our system

1
Justin D. Holmes
University College Cork
Total Publications: 287
 
2
Nikolay Petkov
University College Cork
Total Publications: 64
 
3
Michael A. Morris
University College Cork
Total Publications: 164
 
4
Roisin A Kelly
University College Cork
Total Publications: 10
 
5
Richard G. Hobbs
University College Cork
Total Publications: 11