Type

Journal Article

Authors

Hans Mulders
Piet Trompenaars
Nikolay Petkov
Justin D. Holmes
Angelica Lee
Colm O'Regan

Subjects

Chemistry

Topics
current density nanostructured materials annealing platinum interconnections impurities ebic sintering

Electrical properties of platinum interconnects deposited by electron beam induced deposition of the carbon-free precursor, Pt(PF3)4 (2013)

Abstract Comprehensive analysis of the electrical properties, structure and composition of Pt interconnects, developed via mask-less, electron beam induced deposition of the carbon-free Pt precursor, Pt(PF3)4, is presented. The results demonstrate significantly improved electrical performance in comparison with that generated from the standard organometallic precursor, (CH3)3Pt(CpCH3). In particular, the Pt interconnects exhibited perfect ohmic behavior and resistivity that can be diminished to 0.24 × 10−3 Ω cm, which is only one order of magnitude higher than bulk Pt, in comparison to 0.2 Ω cm for the standard carbon-containing interconnects. A maximum current density of 1.87 × 107 A cm−2 was achieved for the carbon-free Pt, compared to 9.44 × 105 A cm−2 for the standard Pt precursor. The enhanced electrical properties of the as-deposited materials can be explained by the absence of large amounts of carbon impurities, and their further improvement by postdeposition annealing in N2. In-situ TEM heating experiments confirmed that the annealing step induces sintering of the Pt nanocrystals and improved crystallinity, which contributes to the enhanced electrical performance. Alternative annealing under reducing conditions resulted in improved performance of the standard Pt interconnects, while the carbon-free deposit suffered electrical and structural breakage due to formation of larger Pt islands
Collections Ireland -> University College Cork -> Materials Chemistry and Analysis Group
Ireland -> University College Cork -> College of Science, Engineering and Food Science
Ireland -> University College Cork -> Tyndall National Institute
Ireland -> University College Cork -> Micro-Nanoelectronics Centre
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Ireland -> University College Cork -> Materials Chemistry and Analysis Group - Journal articles
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Full list of authors on original publication

Hans Mulders, Piet Trompenaars, Nikolay Petkov, Justin D. Holmes, Angelica Lee, Colm O'Regan

Experts in our system

1
Nikolay Petkov
University College Cork
Total Publications: 64
 
2
Justin D. Holmes
University College Cork
Total Publications: 287
 
3
Colm O'Regan
University College Cork
Total Publications: 16