Type

Journal Article

Authors

Jean-Pierre Colinge
Ran Yu
Vladimir Djara
Kang L. Wang
Faxian Xiu
Justin D. Holmes
Nikolay Petkov
Michael A. Morris
Peter Fleming
Yordan M. Georgiev
and 3 others

Subjects

Physics

Topics
germanium nanofabrication topological insulators nanolithography nanowires electron beam lithography elemental semiconductors bismuth compounds resists

Resist-substrate interface tailoring for generating high density arrays of Ge and Bi2Se3 nanowires by electron beam lithography (2012)

Abstract The authors report a chemical process to remove the native oxide on Ge and Bi2Se3 crystals, thus facilitating high-resolution electron beam lithography (EBL) on their surfaces using a hydrogen silsesquioxane (HSQ) resist. HSQ offers the highest resolution of all the commercially available EBL resists. However, aqueous HSQ developers such as NaOH and tetramethylammonium hydroxide have thus far prevented the fabrication of high-resolution structures via the direct application of HSQ to Ge and Bi2Se3, due to the solubility of components of their respective native oxides in these strong aqueous bases. Here we provide a route to the generation of ordered, high-resolution, high-density Ge and Bi2Se3 nanostructures with potential applications in microelectronics, thermoelectric, and photonics devices.                         
Collections Ireland -> University College Cork -> Materials Chemistry and Analysis Group
Ireland -> University College Cork -> College of Science, Engineering and Food Science
Ireland -> University College Cork -> Tyndall National Institute
Ireland -> University College Cork -> Micro-Nanoelectronics Centre
Ireland -> University College Cork -> Chemistry
Ireland -> University College Cork -> Materials Chemistry and Analysis Group - Journal articles
Ireland -> University College Cork -> Chemistry - Journal Articles
Ireland -> University College Cork -> Research Institutes and Centres

Full list of authors on original publication

Jean-Pierre Colinge, Ran Yu, Vladimir Djara, Kang L. Wang, Faxian Xiu, Justin D. Holmes, Nikolay Petkov, Michael A. Morris, Peter Fleming, Yordan M. Georgiev and 3 others

Experts in our system

1
Ran Yu
University College Cork
Total Publications: 18
 
2
Vladimir Djara
University College Cork
Total Publications: 9
 
3
Justin D. Holmes
University College Cork
Total Publications: 287
 
4
Nikolay Petkov
University College Cork
Total Publications: 64
 
5
Michael A. Morris
University College Cork
Total Publications: 164
 
6
Yordan M. Georgiev
University College Cork
Total Publications: 20