Type

Journal Article

Authors

Michael A. Morris
Justin D. Holmes
Ramsankar Senthamaraikannan
Sozaraj Rasappa
Dipu Borah

Subjects

Physics

Topics
self assembly arrays thin films microwave anneal self assembled nanolithography solvothermal process polymer brush pmma ps b pdms graphoepitaxy fabrication orientation silicon nitride substrate plasma etching silicon lithography block copolymer

Block co-polymers for nanolithography: rapid microwave annealing for pattern formation on substrates (2015)

Abstract The integration of block copolymer (BCP) self-assembled nanopattern formation as an alternative lithographic tool for nanoelectronic device fabrication faces a number of challenges such as defect densities, feature size, pattern transfer, etc. Key barriers are the nanopattern process times and pattern formation on current substrate stack layers such as hard masks (e.g., silicon nitride, Si3N4). We report a rapid microwave assisted solvothermal (in toluene environments) self-assembly and directed self-assembly of a polystyrene-block-polydimethylsiloxane (PS-b-PDMS) BCP thin films on planar and topographically patterned Si3N4 substrates. Hexagonally arranged, cylindrical structures were obtained and good pattern ordering was achieved. Factors affecting BCP self-assembly, notably anneal time and temperature, were studied and seen to have significant effects. Graphoepitaxy within the topographical structures provided long range, translational alignment of the patterns. The effect of surface topography feature size and spacing was investigated. The solvothermal microwave based technique used to provide periodic order in the BCP patterns showed significant promise and ordering was achieved in much shorter periods than more conventional thermal and solvent annealing methods. The implications of the work in terms of manufacturing technologies are discussed.
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Full list of authors on original publication

Michael A. Morris, Justin D. Holmes, Ramsankar Senthamaraikannan, Sozaraj Rasappa, Dipu Borah

Experts in our system

1
Michael A. Morris
University College Cork
Total Publications: 164
 
2
Justin D. Holmes
University College Cork
Total Publications: 287
 
3
Ramsankar Senthamaraikannan
University College Cork
Total Publications: 12
 
4
Sozaraj Rasappa
University College Cork
Total Publications: 13
 
5
Dipu Borah
University College Cork
Total Publications: 17