Type

Conference Proceedings

Authors

Nikolay Petkov
J. J. L. Mulder
Justin D. Holmes
A. Romano-Rodriguez
P. Thrompenaars
Colm O'Regan
R. J. Dias

Subjects

Physics

Topics
nanostructures high resistivity electron microscopy functional materials electron beam induced deposition ebid electrical properties low resistivity

Low resistivity Pt interconnects developed by electron beam assisted deposition using novel gas injector system (2012)

Abstract Electron beam-induced deposition (EBID) is a direct write process where an electron beam locally decomposes a precursor gas leaving behind non-volatile deposits. It is a fast and relatively in-expensive method designed to develop conductive (metal) or isolating (oxide) nanostructures. Unfortunately the EBID process results in deposition of metal nanostructures with relatively high resistivity because the gas precursors employed are hydrocarbon based. We have developed deposition protocols using novel gas-injector system (GIS) with a carbon free Pt precursor. Interconnect type structures were deposited on preformed metal architectures. The obtained structures were analysed by cross-sectional TEM and their electrical properties were analysed ex-situ using four point probe electrical tests. The results suggest that both the structural and electrical characteristics differ significantly from those of Pt interconnects deposited by conventional hydrocarbon based precursors, and show great promise for the development of low resistivity electrical contacts.
Collections Ireland -> University College Cork -> Materials Chemistry and Analysis Group
Ireland -> University College Cork -> College of Science, Engineering and Food Science
Ireland -> University College Cork -> Tyndall National Institute
Ireland -> University College Cork -> Micro-Nanoelectronics Centre
Ireland -> University College Cork -> Chemistry - Conference Items
Ireland -> University College Cork -> Chemistry
Ireland -> University College Cork -> Materials Chemistry and Analysis Group - Conference Items
Ireland -> University College Cork -> Research Institutes and Centres

Full list of authors on original publication

Nikolay Petkov, J. J. L. Mulder, Justin D. Holmes, A. Romano-Rodriguez, P. Thrompenaars, Colm O'Regan, R. J. Dias

Experts in our system

1
Nikolay Petkov
University College Cork
Total Publications: 64
 
2
Justin D. Holmes
University College Cork
Total Publications: 287
 
3
Colm O'Regan
University College Cork
Total Publications: 16