Type

Journal Article

Authors

Justin D. Holmes
Ray Duffy
Colm O'Dwyer
Gerard P. McGlacken
Colm Glynn
Giuliana Impellizzeri
Enrico Napolitani
John O'Connell

Subjects

Chemistry

Topics
mass transfer spectra raman scattering thin films heat treatment x ray photoelectron spectroscopy xps mass spectrometry s doping

Liquid-Phase Monolayer Doping of InGaAs with Si-, S-, and Sn-Containing Organic Molecular Layers (2017)

Abstract The functionalization and subsequent monolayer doping of InGaAs substrates using a tin-containing molecule and a compound containing both silicon and sulfur was investigated. Epitaxial InGaAs layers were grown on semi-insulating InP wafers and functionalized with both sulfur and silicon using mercaptopropyltriethoxysilane and with tin using allyltributylstannane. The functionalized surfaces were characterized using X-ray photoelectron spectroscopy (XPS). The surfaces were capped and subjected to rapid thermal annealing to cause in-diffusion of dopant atoms. Dopant diffusion was monitored using secondary ion mass spectrometry. Raman scattering was utilized to nondestructively determine the presence of dopant atoms, prior to destructive analysis, by comparison to a blank undoped sample. Additionally, due to the As-dominant surface chemistry, the resistance of the functionalized surfaces to oxidation in ambient conditions over periods of 24 h and 1 week was elucidated using XPS by monitoring the As 3d core level for the presence of oxide components.
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Full list of authors on original publication

Justin D. Holmes, Ray Duffy, Colm O'Dwyer, Gerard P. McGlacken, Colm Glynn, Giuliana Impellizzeri, Enrico Napolitani, John O'Connell

Experts in our system

1
Justin D. Holmes
University College Cork
Total Publications: 182
 
2
Ray Duffy
University College Cork
Total Publications: 15
 
3
Colm O'Dwyer
University College Cork
Total Publications: 121
 
4
Gerard P McGlacken
University College Cork
Total Publications: 36
 
5
Colm Glynn
University College Cork
Total Publications: 19
 
6
John O'Connell
University College Cork
Total Publications: 17