Type

Journal Article

Authors

Cindy Colinge
Isabelle Ferain
Michael Morris
Patrick McNally
Farzan Gity
Nick Bennett
Peter Fleming
Ki Yeol Byun

Subjects

Physics

Topics
germanium silicon integration x ray photoelectron spectroscopy synchrotron x ray topography elemental semiconductors surface oxidation germanium interface structure annealing

Comprehensive investigation of Ge-Si bonded interfaces using oxygen radical activation (2011)

Abstract In this work, we investigate the directly bonded germanium-silicon interfaces to facilitate the development of high quality germanium silicon hetero integration at the wafer scale. X-ray photoelectron spectroscopy data is presented which provides the chemical composition of the germanium surfaces as a function of the hydrophilic bonding reaction at the interface. The bonding process induced long range deformation is detected by synchrotron x-ray topography. The hetero-interface is characterized by measuring forward and reverse current, and by high resolution transmission electron microscopy. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3601355]
Collections Ireland -> University College Cork -> College of Science, Engineering and Food Science
Ireland -> University College Cork -> Tyndall National Institute
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Ireland -> University College Cork -> Tyndall National Institute - Journal Articles
Ireland -> University College Cork -> Environmental Research Institute
Ireland -> University College Cork -> Chemistry
Ireland -> University College Cork -> Chemistry - Journal Articles
Ireland -> University College Cork -> Research Institutes and Centres

Full list of authors on original publication

Cindy Colinge, Isabelle Ferain, Michael Morris, Patrick McNally, Farzan Gity, Nick Bennett, Peter Fleming, Ki Yeol Byun

Experts in our system

1
Michael A. Morris
University College Cork
Total Publications: 164
 
2
Patrick J. McNally
Dublin City University
Total Publications: 47
 
3
Farzan Gity
University College Cork
Total Publications: 26
 
4
N.S. Bennett
Dublin City University
Total Publications: 8